Nb SQUID가 탑재된 초고감도 캔티레버 제작Fabrication of Nb SQUID on an Ultra-sensitive Cantilever
- Other Titles
- Fabrication of Nb SQUID on an Ultra-sensitive Cantilever
- Authors
- 김윤원; 이순걸; 최재혁
- Issue Date
- 2009
- Publisher
- 한국초전도학회
- Keywords
- Nb; Thin film; Superconductor; SQUID; Ultra sensitive; Cantilever
- Citation
- Progress in Superconductivity, v.11, no.1, pp.36 - 41
- Indexed
- KCI
OTHER
- Journal Title
- Progress in Superconductivity
- Volume
- 11
- Number
- 1
- Start Page
- 36
- End Page
- 41
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/121794
- ISSN
- 1229-4764
- Abstract
- Superconducting quantum phenomena are getting attention from the field of metrology area. Following its first successful application of Josephson effect to voltage standard, piconewton force standard was suggested as a candidate for the next application of superconducting quantum effects in metrology. It is predicted that a micron-sized superconducting Nb ring in a
strong magnetic field gradient generates a quantized force of the order of sub-piconewtons. In this work, we studied the design and fabrication of Nb superconducting quantum interference device (SQUID) on an ultra-thin silicon cantilever. The Nb SQUID and electrodes were structured on a silicon-on-insulator (SOI) wafer by dc magnetron sputtering and lift-off lithography. Using the resulting SOI wafer, we fabricated V-shaped and parallel-beam cantilevers, each with a 30-㎛-wide paddle; the length, width, and thickness of each cantilever arm were typically 440 ㎛, 4.5 ㎛, and 0.34 ㎛, respectively. However, the cantilevers underwent bending, a technical difficulty commonly encountered during the fabrication of electrical circuits on ultra-soft mechanical substrates. In order to circumvent this difficulty, we controlled the Ar pressure during Nb sputtering to minimize the intrinsic stress in the Nb film and studied the effect of residual stress on the resultant device.
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Collections - College of Science and Technology > Semiconductor Physics in Division of Display and Semiconductor Physics > 1. Journal Articles
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