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A Micro-Electromechanical System Based Hydrogen Gas Sensor
- Authors
- Lee, E. B.; Yeo, C. H.; Shin, K.; Lee, K. J.; Lee, H. J.; Lee, W. B.; Ju, B. K.
- Issue Date
- Dec-2008
- Publisher
- AMER SCIENTIFIC PUBLISHERS
- Keywords
- MEMS; Hydrogen; SnO2; Temperature Coefficient of Resistance
- Citation
- SENSOR LETTERS, v.6, no.6, pp.1014 - 1018
- Indexed
- SCIE
SCOPUS
- Journal Title
- SENSOR LETTERS
- Volume
- 6
- Number
- 6
- Start Page
- 1014
- End Page
- 1018
- ISSN
- 1546-198X
- Abstract
- We describe the fabrication processes and the characterizations of a MEMS (Micro-electromechanical systems) based hydrogen gas sensor. The gas sensor is made by MEMS based on a semiconductor fabrication method except for the ceramic bulk. The heating electrode and sensing electrode were formed being apart from the substrate by using MEMS and SnO2 ceramic bulk as a gas sensitive material was formed extending over the heating and sensing electrode. The SnO2 gas sensor with the micro-hotplate showed good response to the H-2 gas at 50 similar to 20,000 ppm and high selectivity as compared to other gases as CO, H2S, and CH4. The value obtained of the TCR is 1.61 x 10(-3) K-1. The TCR of the micro hotplate is lower than the TCR of bulk Pt as the thickness of the micro hotplate is only 2 mu m.
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Related Researcher
- Ju, Byeong kwon
- College of Engineering (School of Electrical Engineering)