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Surface Analysis of Plasma Pretreated Sapphire Substrate for AlN Buffer Layer
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | BYUN, Dong Jin | - |
| dc.date.accessioned | 2021-08-27T16:44:52Z | - |
| dc.date.available | 2021-08-27T16:44:52Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2019-05-28 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/12309 | - |
| dc.publisher | European Materials Research Society | - |
| dc.title | Surface Analysis of Plasma Pretreated Sapphire Substrate for AlN Buffer Layer | - |
| dc.title.alternative | Surface Analysis of Plasma Pretreated Sapphire Substrate for AlN Buffer Layer | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | BYUN, Dong Jin | - |
| dc.identifier.bibliographicCitation | The 2019 Spring Meeting of the European Materials Research Society | - |
| dc.relation.isPartOf | The 2019 Spring Meeting of the European Materials Research Society | - |
| dc.relation.isPartOf | The 2019 Spring Meeting of the European Materials Research Society | - |
| dc.citation.title | The 2019 Spring Meeting of the European Materials Research Society | - |
| dc.citation.conferencePlace | FR | - |
| dc.citation.conferenceDate | 2019-05-27 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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