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Surface Analysis of Plasma Pretreated Sapphire Substrate for AlN Buffer LayerSurface Analysis of Plasma Pretreated Sapphire Substrate for AlN Buffer Layer
- Alternative Title
- Surface Analysis of Plasma Pretreated Sapphire Substrate for AlN Buffer Layer
- Authors
- BYUN, Dong Jin
- Issue Date
- 28-5월-2019
- Publisher
- European Materials Research Society
- Citation
- The 2019 Spring Meeting of the European Materials Research Society
- Conference Name
- The 2019 Spring Meeting of the European Materials Research Society
- Place
- FR
- Conference Date
- 2019-05-27
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