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Improvement of uncooled infrared imaging detector by using mesoporous silica as a thermal isolation layer

Authors
Choi, Sun GyuHa, Tae-JungYu, Byoung-GonJaung, Seung PilKwon, OhmyoungPark, Hyung-Ho
Issue Date
5월-2008
Publisher
ELSEVIER SCI LTD
Keywords
porosity; thermal conductivity; SiO2; sensors
Citation
CERAMICS INTERNATIONAL, v.34, no.4, pp.833 - 836
Indexed
SCIE
SCOPUS
Journal Title
CERAMICS INTERNATIONAL
Volume
34
Number
4
Start Page
833
End Page
836
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/123662
DOI
10.1016/j.ceramint.2007.09.088
ISSN
0272-8842
Abstract
Thermal-insulation properties of ordered mesoporous silica could possibly improve the efficiency of uncooled infrared imaging detector by introducing a mesoporous silica layer between TiN absorber and Si3N4 passivation layer. IR absorption rate of 50% porosity mesoporous silica was simulated and the results showed that above 90% infrared absorptance could be achieved in 8-12 mu m wavelength region. Thermal conductivity of mesoporous silica was measured by 3 omega method. Finite element modeling was used to simulate thermal isolation effect of mesoporous silica inserted structure. The result shows that an effective thermal-insulation effect could be obtained with 150 tun thick mesoporous silica layer. Also according to the simulation result of time transient temperature variation, it was found that mesoporous silica layer for thermal isolation induced an increase of 30% of residual temperature on TiN absorber. The mesoporous silica film was found to be a good thermal isolation layer for microbolometer. (C) 2007 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
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공과대학 (기계공학부)
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