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LTCC 를 이용한 SnO2 가스 센서

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dc.contributor.author조평석-
dc.contributor.author강종윤-
dc.contributor.author김선중-
dc.contributor.author김진상-
dc.contributor.author윤석진-
dc.contributor.authorNguyen Van Hieu-
dc.contributor.author이종흔-
dc.date.accessioned2021-09-09T13:54:04Z-
dc.date.available2021-09-09T13:54:04Z-
dc.date.created2021-06-17-
dc.date.issued2008-
dc.identifier.issn1225-0562-
dc.identifier.urihttps://scholar.korea.ac.kr/handle/2021.sw.korea/124733-
dc.description.abstractSensor element array for combinatorial solution deposition research was fabricated using LTCC(Low Temperature Co-fired Ceramics). Designed LTCC was co-fired at 800℃ for 1 hour after lamination at 70℃ under 3000 psi for 30 minutes. SnO₂sol was prepared by hydrothermal method at 200℃ for 3 hours. Tin chloride and ammonium carbonate were used as raw materials and ammonia solution was added to Teflon jar. 20 droplets of SnO₂sol was deposited on the LTCC sensor element and heat treated at 600℃ for 5 hours. The gas sensitivity(S=Ra/Rg) of SnO₂sensor and 0.04wt% Pd added SnO₂sensor were measured. 0.04wt% Pd added SnO₂sensor shows higher sensitivity(S=8.1) than SnO2 sensor(S=5.95) to 200ppm CH₃COCH₃at 400℃-
dc.languageKorean-
dc.language.isoko-
dc.publisher한국재료학회-
dc.titleLTCC 를 이용한 SnO2 가스 센서-
dc.title.alternativeSnO2 Gas Sensors Using LTCC (Low Temperature Co-fired Ceramics)-
dc.typeArticle-
dc.contributor.affiliatedAuthor이종흔-
dc.identifier.bibliographicCitation한국재료학회지, v.18, no.2, pp.152 - 166-
dc.relation.isPartOf한국재료학회지-
dc.citation.title한국재료학회지-
dc.citation.volume18-
dc.citation.number2-
dc.citation.startPage152-
dc.citation.endPage166-
dc.type.rimsART-
dc.identifier.kciidART001214591-
dc.description.journalClass1-
dc.description.journalRegisteredClassscopus-
dc.description.journalRegisteredClasskci-
dc.subject.keywordAuthorLTCC(Low Temperature Co-fired Ceramics)-
dc.subject.keywordAuthorcombinatorial solution deposition-
dc.subject.keywordAuthorSnO₂sol-
dc.subject.keywordAuthorgas sensor-
dc.subject.keywordAuthorLTCC(Low Temperature Co-fired Ceramics)-
dc.subject.keywordAuthorcombinatorial solution deposition-
dc.subject.keywordAuthorSnO₂sol-
dc.subject.keywordAuthorgas sensor-
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