LTCC 를 이용한 SnO2 가스 센서
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 조평석 | - |
dc.contributor.author | 강종윤 | - |
dc.contributor.author | 김선중 | - |
dc.contributor.author | 김진상 | - |
dc.contributor.author | 윤석진 | - |
dc.contributor.author | Nguyen Van Hieu | - |
dc.contributor.author | 이종흔 | - |
dc.date.accessioned | 2021-09-09T13:54:04Z | - |
dc.date.available | 2021-09-09T13:54:04Z | - |
dc.date.created | 2021-06-17 | - |
dc.date.issued | 2008 | - |
dc.identifier.issn | 1225-0562 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/124733 | - |
dc.description.abstract | Sensor element array for combinatorial solution deposition research was fabricated using LTCC(Low Temperature Co-fired Ceramics). Designed LTCC was co-fired at 800℃ for 1 hour after lamination at 70℃ under 3000 psi for 30 minutes. SnO₂sol was prepared by hydrothermal method at 200℃ for 3 hours. Tin chloride and ammonium carbonate were used as raw materials and ammonia solution was added to Teflon jar. 20 droplets of SnO₂sol was deposited on the LTCC sensor element and heat treated at 600℃ for 5 hours. The gas sensitivity(S=Ra/Rg) of SnO₂sensor and 0.04wt% Pd added SnO₂sensor were measured. 0.04wt% Pd added SnO₂sensor shows higher sensitivity(S=8.1) than SnO2 sensor(S=5.95) to 200ppm CH₃COCH₃at 400℃ | - |
dc.language | Korean | - |
dc.language.iso | ko | - |
dc.publisher | 한국재료학회 | - |
dc.title | LTCC 를 이용한 SnO2 가스 센서 | - |
dc.title.alternative | SnO2 Gas Sensors Using LTCC (Low Temperature Co-fired Ceramics) | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | 이종흔 | - |
dc.identifier.bibliographicCitation | 한국재료학회지, v.18, no.2, pp.152 - 166 | - |
dc.relation.isPartOf | 한국재료학회지 | - |
dc.citation.title | 한국재료학회지 | - |
dc.citation.volume | 18 | - |
dc.citation.number | 2 | - |
dc.citation.startPage | 152 | - |
dc.citation.endPage | 166 | - |
dc.type.rims | ART | - |
dc.identifier.kciid | ART001214591 | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scopus | - |
dc.description.journalRegisteredClass | kci | - |
dc.subject.keywordAuthor | LTCC(Low Temperature Co-fired Ceramics) | - |
dc.subject.keywordAuthor | combinatorial solution deposition | - |
dc.subject.keywordAuthor | SnO₂sol | - |
dc.subject.keywordAuthor | gas sensor | - |
dc.subject.keywordAuthor | LTCC(Low Temperature Co-fired Ceramics) | - |
dc.subject.keywordAuthor | combinatorial solution deposition | - |
dc.subject.keywordAuthor | SnO₂sol | - |
dc.subject.keywordAuthor | gas sensor | - |
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