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LTCC 를 이용한 SnO2 가스 센서SnO2 Gas Sensors Using LTCC (Low Temperature Co-fired Ceramics)
- Other Titles
- SnO2 Gas Sensors Using LTCC (Low Temperature Co-fired Ceramics)
- Issue Date
- 2008
- Publisher
- 한국재료학회
- Keywords
- LTCC(Low Temperature Co-fired Ceramics); combinatorial solution deposition; SnO₂sol; gas sensor; LTCC(Low Temperature Co-fired Ceramics); combinatorial solution deposition; SnO₂sol; gas sensor
- Citation
- 한국재료학회지, v.18, no.2, pp.152 - 166
- Indexed
- SCOPUS
KCI
- Journal Title
- 한국재료학회지
- Volume
- 18
- Number
- 2
- Start Page
- 152
- End Page
- 166
- ISSN
- 1225-0562
- Abstract
- Sensor element array for combinatorial solution deposition research was fabricated using LTCC(Low Temperature Co-fired Ceramics). Designed LTCC was co-fired at 800℃ for 1 hour after lamination at 70℃ under 3000 psi for 30 minutes. SnO₂sol was prepared by hydrothermal method at 200℃ for 3 hours. Tin chloride and ammonium carbonate were used as raw materials and ammonia solution was added to Teflon jar. 20 droplets of SnO₂sol was deposited on the LTCC sensor element and heat treated at 600℃ for 5 hours. The gas sensitivity(S=Ra/Rg) of SnO₂sensor and 0.04wt% Pd added SnO₂sensor were measured. 0.04wt% Pd added SnO₂sensor shows higher sensitivity(S=8.1) than SnO2 sensor(S=5.95) to 200ppm CH₃COCH₃at 400℃
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