주사탐침열현미경의 감도향상을 위한 전체 실리콘 산화막 열전탐침의 열적설계 및 일괄제작Thermal Design and Batch Fabrication of Full SiO₂ SThM Probes for Sensitivity Improvement
- Other Titles
- Thermal Design and Batch Fabrication of Full SiO₂ SThM Probes for Sensitivity Improvement
- Authors
- 정승필; 김경태; 원종보; 박승호; 최영기; 이준식; 권오명
- Issue Date
- 2008
- Publisher
- 대한기계학회
- Keywords
- 주사탐침열현미경; 열저항 탐침; 열전탐침; Scanning Thermal Microscope: SThM; Thermo-resistive Probe; Thermoelectric Probe
- Citation
- 대한기계학회논문집 B, v.32, no.10, pp.800 - 809
- Indexed
- SCOPUS
KCI
- Journal Title
- 대한기계학회논문집 B
- Volume
- 32
- Number
- 10
- Start Page
- 800
- End Page
- 809
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/125125
- ISSN
- 1226-4881
- Abstract
- Scanning Thermal Microscope (SThM) is the tool that can map out temperature or the thermal property distribution with the highest spatial resolution. Since the local temperature or the thermal property of samples is measured from the extremely small heat transferred through the nanoscale tip-sample contact, improving the sensitivity of SThM probe has always been the key issue. In this study, we develop a new design and fabrication process of SThM probe to improve the sensitivity. The fabrication process is optimized so that cantilevers and tips are made of thermally grown silicon dioxide, which has the lowest thermal conductivity among the materials used in MEMS. The new design allows much higher tip so that heat transfer through the air gap between the sample-probe is reduced further. The position of a reflector is located as far away as possible to minimize the thermal perturbation due to the laser. These full SiO₂ SThM probes have much higher sensitivity than that of previous ones.
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Collections - College of Engineering > Department of Mechanical Engineering > 1. Journal Articles
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