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Analyzing measurement accuracy and causes of error in Vacuum Null Point Scanning Thermal Microscope by increasing the degree vacuum
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | KWON, Oh Myoung | - |
| dc.date.accessioned | 2021-08-27T17:03:24Z | - |
| dc.date.available | 2021-08-27T17:03:24Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2019-05-23 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/12694 | - |
| dc.publisher | 대한기계학회 | - |
| dc.title | Analyzing measurement accuracy and causes of error in Vacuum Null Point Scanning Thermal Microscope by increasing the degree vacuum | - |
| dc.title.alternative | 진공도가 올라감에 따라 진공 평형점 주사탐침열현미경의 계측정확도와 오차의 원인분석 | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | KWON, Oh Myoung | - |
| dc.identifier.bibliographicCitation | 열공학부문 2019년도 춘계학술대회 | - |
| dc.relation.isPartOf | 열공학부문 2019년도 춘계학술대회 | - |
| dc.relation.isPartOf | 대한기계학회 열공학부문 2019년도 춘계학술대회 논문집 | - |
| dc.citation.title | 열공학부문 2019년도 춘계학술대회 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferencePlace | 부산BEXCO | - |
| dc.citation.conferenceDate | 2019-05-22 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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