Quasi-periodic micro-lens array via laser-assisted wet etching
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Baek, Gi Hyeon | - |
dc.contributor.author | Hwang, Eui Sun | - |
dc.contributor.author | Cheong, Byoung-Ho | - |
dc.date.accessioned | 2022-11-17T21:40:40Z | - |
dc.date.available | 2022-11-17T21:40:40Z | - |
dc.date.created | 2022-11-17 | - |
dc.date.issued | 2022-10-01 | - |
dc.identifier.issn | 2158-3226 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/145682 | - |
dc.description.abstract | A close-packed micro-lens array (MLA) is widely used not only in novel optical systems but also in various engineering fields, such as semiconductors and display devices. In this paper, we present a simple and efficient method for fabricating MLAs on a glass substrate via laser ablation with a single femtosecond laser pulse and chemical wet etching in a hydrofluoric acid solution. The shapes of concave micro-lenses were optimized for laser pulse energy and etching time, and & SIM;70 000 micro-lenses with 15 mu m diameter were formed. The shape of the micro-lens varies significantly with respect to the etching time in accordance with an initial ablated area (or laser energy), which is a key feature in fabricating micro-lenses of several tens of mu m. Using the glass MLA as a mold, a polydimethylsiloxane convex-plano lens array was replicated, and the performance of the optical imaging and beam integrator was then examined. (C) 2022 Author(s). | - |
dc.language | English | - |
dc.language.iso | en | - |
dc.publisher | AIP Publishing | - |
dc.subject | NUMERICAL APERTURE | - |
dc.subject | EXCIMER-LASER | - |
dc.subject | FABRICATION | - |
dc.subject | LIGHT | - |
dc.subject | EFFICIENT | - |
dc.subject | PERFORMANCE | - |
dc.subject | HOMOGENIZER | - |
dc.subject | RESOLUTION | - |
dc.subject | FLAT | - |
dc.title | Quasi-periodic micro-lens array via laser-assisted wet etching | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Cheong, Byoung-Ho | - |
dc.identifier.doi | 10.1063/5.0118006 | - |
dc.identifier.scopusid | 2-s2.0-85141027345 | - |
dc.identifier.wosid | 000876695300002 | - |
dc.identifier.bibliographicCitation | AIP ADVANCES, v.12, no.10 | - |
dc.relation.isPartOf | AIP ADVANCES | - |
dc.citation.title | AIP ADVANCES | - |
dc.citation.volume | 12 | - |
dc.citation.number | 10 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | Y | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | NUMERICAL APERTURE | - |
dc.subject.keywordPlus | EXCIMER-LASER | - |
dc.subject.keywordPlus | FABRICATION | - |
dc.subject.keywordPlus | LIGHT | - |
dc.subject.keywordPlus | EFFICIENT | - |
dc.subject.keywordPlus | PERFORMANCE | - |
dc.subject.keywordPlus | HOMOGENIZER | - |
dc.subject.keywordPlus | RESOLUTION | - |
dc.subject.keywordPlus | FLAT | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
145 Anam-ro, Seongbuk-gu, Seoul, 02841, Korea+82-2-3290-2963
COPYRIGHT © 2021 Korea University. All Rights Reserved.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.