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Quasi-periodic micro-lens array via laser-assisted wet etchingopen access

Authors
Baek, Gi HyeonHwang, Eui SunCheong, Byoung-Ho
Issue Date
1-10월-2022
Publisher
AIP Publishing
Citation
AIP ADVANCES, v.12, no.10
Indexed
SCIE
SCOPUS
Journal Title
AIP ADVANCES
Volume
12
Number
10
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/145682
DOI
10.1063/5.0118006
ISSN
2158-3226
Abstract
A close-packed micro-lens array (MLA) is widely used not only in novel optical systems but also in various engineering fields, such as semiconductors and display devices. In this paper, we present a simple and efficient method for fabricating MLAs on a glass substrate via laser ablation with a single femtosecond laser pulse and chemical wet etching in a hydrofluoric acid solution. The shapes of concave micro-lenses were optimized for laser pulse energy and etching time, and & SIM;70 000 micro-lenses with 15 mu m diameter were formed. The shape of the micro-lens varies significantly with respect to the etching time in accordance with an initial ablated area (or laser energy), which is a key feature in fabricating micro-lenses of several tens of mu m. Using the glass MLA as a mold, a polydimethylsiloxane convex-plano lens array was replicated, and the performance of the optical imaging and beam integrator was then examined. (C) 2022 Author(s).
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