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Air Void Formation on Patterned Sapphire Substrate using Photoresist Carbonization ProcessAir Void Formation on Patterned Sapphire Substrate using Photoresist Carbonization Process
- Alternative Title
- Air Void Formation on Patterned Sapphire Substrate using Photoresist Carbonization Process
- Authors
- BYUN, Dong Jin
- Issue Date
- 8-11월-2018
- Publisher
- 한국재료학회
- Citation
- 2018년도 학국재료학회 추계학술대회
- Conference Name
- 2018년도 학국재료학회 추계학술대회
- Place
- KO
- Conference Date
- 2018-11-07
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