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Air Tunnel Fabrication in GaN/Sapphire for Chemical Lift-offAir Tunnel Fabrication in GaN/Sapphire for Chemical Lift-off
- Alternative Title
- Air Tunnel Fabrication in GaN/Sapphire for Chemical Lift-off
- Authors
- BYUN, Dong Jin
- Issue Date
- 8-11월-2018
- Publisher
- Materials Research Society of Korea
- Citation
- The 5th Korea-Japan International Symposium on Materials Science and Technology 2018
- Conference Name
- The 5th Korea-Japan International Symposium on Materials Science and Technology 2018
- Place
- KO
- Conference Date
- 2018-11-07
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