유기 금속 화학 증착 장비를 이용하여 Ga, Al 전구체와 챔버 유량률에 따른 AlGaN 에피성장 조사유기 금속 화학 증착 장비를 이용하여 Ga, Al 전구체와 챔버 유량률에 따른 AlGaN 에피성장 조사
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