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Surface Analysis of Plasma Pretreated Sapphire Substrate for AlN Buffer LayerSurface Analysis of Plasma Pretreated Sapphire Substrate for AlN Buffer Layer
- Alternative Title
- Surface Analysis of Plasma Pretreated Sapphire Substrate for AlN Buffer Layer
- Authors
- BYUN, Dong Jin
- Issue Date
- 16-11월-2017
- Publisher
- 한국재료학회
- Citation
- 2017년도 한국재료학회 추계학술대회
- Conference Name
- 2017년도 한국재료학회 추계학술대회
- Place
- KO
- Conference Date
- 2017-11-15
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