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Atomic Layer Deposition (ALD) 및 Molecular Layer Deposition (MLD) 하이브리드 공정을 활용한 Al-doped ZnO (AZO)/Alucone 다층박막의 인장거동의 평가
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Byoung-Ho Choi | - |
| dc.date.accessioned | 2021-08-28T03:48:06Z | - |
| dc.date.available | 2021-08-28T03:48:06Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2017-11-01 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/21621 | - |
| dc.publisher | 대한기계학회 | - |
| dc.title | Atomic Layer Deposition (ALD) 및 Molecular Layer Deposition (MLD) 하이브리드 공정을 활용한 Al-doped ZnO (AZO)/Alucone 다층박막의 인장거동의 평가 | - |
| dc.title.alternative | Evaluation of Tensile Behavior of Al-doped ZnO (AZO)/Alucone Multilayer Thin film by Atomic Layer Deposition (ALD) and Molecular Layer Deposition (MLD) Hybrid Methods | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Byoung-Ho Choi | - |
| dc.identifier.bibliographicCitation | 대한기계학회 2017년도 학술대회 | - |
| dc.relation.isPartOf | 대한기계학회 2017년도 학술대회 | - |
| dc.relation.isPartOf | 대한기계학회 2017년도 학술대회 | - |
| dc.citation.title | 대한기계학회 2017년도 학술대회 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferenceDate | 2017-11-01 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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