Atomic Layer Deposition (ALD) 및 Molecular Layer Deposition (MLD) 하이브리드 공정을 활용한 Al-doped ZnO (AZO)/Alucone 다층박막의 인장거동의 평가Evaluation of Tensile Behavior of Al-doped ZnO (AZO)/Alucone Multilayer Thin film by Atomic Layer Deposition (ALD) and Molecular Layer Deposition (MLD) Hybrid Methods
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