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Surface analysis of N2 plasma treated sapphire substrate for AlN buffer layerSurface analysis of N2 plasma treated sapphire substrate for AlN buffer layer
- Alternative Title
- Surface analysis of N2 plasma treated sapphire substrate for AlN buffer layer
- Authors
- BYUN, Dong Jin
- Issue Date
- 25-8월-2017
- Publisher
- The Materials Science Society of Japan
- Citation
- Japan-Korea Materials Science Technology 2017
- Conference Name
- Japan-Korea Materials Science Technology 2017
- Place
- JA
Osaka, Kindai University
- Conference Date
- 2017-08-24
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