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Pump life monitoring and failure prediction based on vibration signal analysis in semiconductor manufacturing processPump life monitoring and failure prediction based on vibration signal analysis in semiconductor manufacturing process
- Alternative Title
- Pump life monitoring and failure prediction based on vibration signal analysis in semiconductor manufacturing process
- Authors
- Jun-Geol Baek
- Issue Date
- 18-7월-2017
- Publisher
- IFORS
- Citation
- 21st Conference of the International Federation of Operational Research Societies (IFORS 2017)
- Conference Name
- 21st Conference of the International Federation of Operational Research Societies (IFORS 2017)
- Place
- CN
Quebec City, Canada
- Conference Date
- 2017-07-17
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