플라즈마 노출시간 변화에 따른 SiNx 막의 패시베이션 및 광학적 특성

Kang Yoon Mook

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플라즈마 노출시간 변화에 따른 SiNx 막의 패시베이션 및 광학적 특성플라즈마 노출시간 변화에 따른 SiNx 막의 패시베이션 및 광학적 특성

Alternative Title: 플라즈마 노출시간 변화에 따른 SiNx 막의 패시베이션 및 광학적 특성

Authors: Kang Yoon Mook

Issue Date: 18-5월-2017

Publisher: 한국재료학회

Citation: 한국재료학회 춘계학술대회

URI: https://scholar.korea.ac.kr/handle/2021.sw.korea/24101

Conference Name: 한국재료학회 춘계학술대회

Place: KO

Conference Date: 2017-05-17

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Appears in Collections: Graduate School of Energy and Environment (KU-KIST GREEN SCHOOL) > Department of Energy and Environment > 2. Conference Papers

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