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Necessity and effects of Thermal Blocking Liner for ECR plasmaNecessity and effects of Thermal Blocking Liner for ECR plasma
- Alternative Title
- Necessity and effects of Thermal Blocking Liner for ECR plasma
- Authors
- Hong MunPyo
- Issue Date
- 17-2월-2017
- Publisher
- (사)한국진공학회(KVS)
- Citation
- 제52회 한국진공학회 동계정기학술대회
- Conference Name
- 제52회 한국진공학회 동계정기학술대회
- Place
- KO
- Conference Date
- 2017-02-15
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Collections - Graduate School > Department of Applied Physics > 2. Conference Papers
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