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Thermal ALD 펄스 시간에 따른 Al2O3 패시베이션막 특성
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kang Yoon Mook | - |
| dc.date.accessioned | 2021-08-28T09:50:16Z | - |
| dc.date.available | 2021-08-28T09:50:16Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2017-02-16 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/25281 | - |
| dc.publisher | 한국진공학회 | - |
| dc.title | Thermal ALD 펄스 시간에 따른 Al2O3 패시베이션막 특성 | - |
| dc.title.alternative | Thermal ALD 펄스 시간에 따른 Al2O3 패시베이션막 특성 | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Kang Yoon Mook | - |
| dc.identifier.bibliographicCitation | 제52회 한국진공학회 | - |
| dc.relation.isPartOf | 제52회 한국진공학회 | - |
| dc.relation.isPartOf | 제52회 한국진공학회 | - |
| dc.citation.title | 제52회 한국진공학회 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferenceDate | 2017-02-15 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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