Thermal ALD 펄스 시간에 따른 Al2O3 패시베이션막 특성

Kang Yoon Mook

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Thermal ALD 펄스 시간에 따른 Al2O3 패시베이션막 특성Thermal ALD 펄스 시간에 따른 Al2O3 패시베이션막 특성

Alternative Title: Thermal ALD 펄스 시간에 따른 Al2O3 패시베이션막 특성

Authors: Kang Yoon Mook

Issue Date: 16-2월-2017

Publisher: 한국진공학회

Citation: 제52회 한국진공학회

URI: https://scholar.korea.ac.kr/handle/2021.sw.korea/25281

Conference Name: 제52회 한국진공학회

Place: KO

Conference Date: 2017-02-15

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Appears in Collections: Graduate School of Energy and Environment (KU-KIST GREEN SCHOOL) > Department of Energy and Environment > 2. Conference Papers

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