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Characteristics of Sputtered AlN Buffer Layer as Function of N2 Partial Pressure on Patterned Sapphire Substrate
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | BYUN, Dong Jin | - |
| dc.date.accessioned | 2021-08-28T11:34:13Z | - |
| dc.date.available | 2021-08-28T11:34:13Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2016-11-17 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/26194 | - |
| dc.publisher | 한국재료학회 | - |
| dc.title | Characteristics of Sputtered AlN Buffer Layer as Function of N2 Partial Pressure on Patterned Sapphire Substrate | - |
| dc.title.alternative | Characteristics of Sputtered AlN Buffer Layer as Function of N2 Partial Pressure on Patterned Sapphire Substrate | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | BYUN, Dong Jin | - |
| dc.identifier.bibliographicCitation | 2016년도 한국재료학회 추계학술대회 및 한-일 재료공학 심포지엄 | - |
| dc.relation.isPartOf | 2016년도 한국재료학회 추계학술대회 및 한-일 재료공학 심포지엄 | - |
| dc.relation.isPartOf | 2016년도 한국재료학회 추계학술대회 및 한-일 재료공학 심포지엄 | - |
| dc.citation.title | 2016년도 한국재료학회 추계학술대회 및 한-일 재료공학 심포지엄 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferenceDate | 2016-11-15 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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