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Characteristics of Sputtered AlN Buffer Layer as Function of N2 Partial Pressure on Patterned Sapphire SubstrateCharacteristics of Sputtered AlN Buffer Layer as Function of N2 Partial Pressure on Patterned Sapphire Substrate
- Alternative Title
- Characteristics of Sputtered AlN Buffer Layer as Function of N2 Partial Pressure on Patterned Sapphire Substrate
- Authors
- BYUN, Dong Jin
- Issue Date
- 17-11월-2016
- Publisher
- 한국재료학회
- Citation
- 2016년도 한국재료학회 추계학술대회 및 한-일 재료공학 심포지엄
- Conference Name
- 2016년도 한국재료학회 추계학술대회 및 한-일 재료공학 심포지엄
- Place
- KO
- Conference Date
- 2016-11-15
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