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Superhard SiC Thin Film Deposited by Unbalanced Magnetron Sputtering Method
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Huh, Joo Youl | - |
| dc.date.accessioned | 2021-08-28T13:48:44Z | - |
| dc.date.available | 2021-08-28T13:48:44Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2016-09-26 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/27574 | - |
| dc.publisher | ISASC 2016 | - |
| dc.title | Superhard SiC Thin Film Deposited by Unbalanced Magnetron Sputtering Method | - |
| dc.title.alternative | Superhard SiC Thin Film Deposited by Unbalanced Magnetron Sputtering Method | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Huh, Joo Youl | - |
| dc.identifier.bibliographicCitation | 4th International Symposium on New Frontier of Advanced Si-Based Ceramics and Composites(ISASC 2016) | - |
| dc.relation.isPartOf | 4th International Symposium on New Frontier of Advanced Si-Based Ceramics and Composites(ISASC 2016) | - |
| dc.relation.isPartOf | ISASC 2016 Abstracts | - |
| dc.citation.title | 4th International Symposium on New Frontier of Advanced Si-Based Ceramics and Composites(ISASC 2016) | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferenceDate | 2016-09-25 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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