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Superhard SiC Thin Film Deposited by Unbalanced Magnetron Sputtering MethodSuperhard SiC Thin Film Deposited by Unbalanced Magnetron Sputtering Method
- Alternative Title
- Superhard SiC Thin Film Deposited by Unbalanced Magnetron Sputtering Method
- Authors
- Huh, Joo Youl
- Issue Date
- 26-9월-2016
- Publisher
- ISASC 2016
- Citation
- 4th International Symposium on New Frontier of Advanced Si-Based Ceramics and Composites(ISASC 2016)
- Conference Name
- 4th International Symposium on New Frontier of Advanced Si-Based Ceramics and Composites(ISASC 2016)
- Place
- KO
- Conference Date
- 2016-09-25
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