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Process effects on morphology, electrical and optical properties of a-InGaZnO thin films by magnetic field shielded sputtering
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Hong MunPyo | - |
| dc.date.accessioned | 2021-08-28T14:34:54Z | - |
| dc.date.available | 2021-08-28T14:34:54Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2016-08-24 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/27997 | - |
| dc.publisher | The Korean Vacuum Society (KVS) | - |
| dc.title | Process effects on morphology, electrical and optical properties of a-InGaZnO thin films by magnetic field shielded sputtering | - |
| dc.title.alternative | Process effects on morphology, electrical and optical properties of a-InGaZnO thin films by magnetic field shielded sputtering | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Hong MunPyo | - |
| dc.identifier.bibliographicCitation | IVC-20(20th International Vacuum Congress) | - |
| dc.relation.isPartOf | IVC-20(20th International Vacuum Congress) | - |
| dc.relation.isPartOf | IVC-20(20th International Vacuum Congress) | - |
| dc.citation.title | IVC-20(20th International Vacuum Congress) | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferenceDate | 2016-08-21 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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