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The effects of annealing on electrical and crystalline properties of ZnO thin film by atomic layer depositionThe effects of annealing on electrical and crystalline properties of ZnO thin film by atomic layer deposition
- Alternative Title
- The effects of annealing on electrical and crystalline properties of ZnO thin film by atomic layer deposition
- Authors
- BYUN, Dong Jin
- Issue Date
- 19-5월-2016
- Publisher
- 한국재료학회
- Citation
- 2016년도 한국재료학회 춘계학술대회
- Conference Name
- 2016년도 한국재료학회 춘계학술대회
- Place
- KO
- Conference Date
- 2016-05-18
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