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Complex effects to sensing mechanism of microdiaphragm resonating sensor and enhancement of sensitivity based on the complex effectsComplex effects to sensing mechanism of microdiaphragm resonating sensor and enhancement of sensitivity based on the complex effects

Alternative Title
Complex effects to sensing mechanism of microdiaphragm resonating sensor and enhancement of sensitivity based on the complex effects
Authors
PARK, JUNG HO
Issue Date
2-12월-2015
Publisher
Materials Research Society
Citation
Materials Research Society 2015
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/31005
Conference Name
Materials Research Society 2015
Place
US
Conference Date
2015-12-29
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College of Engineering > School of Electrical Engineering > 2. Conference Papers

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