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FEM(Finite Element Method)를 이용한 CMP(Chemical Mechanical Process) 공정 시뮬레이션과 Run-to-Run 제어 기법에 관한 연구
- Authors
- Jun-Geol Baek
- Issue Date
- 22-5월-2009
- Publisher
- 한국경영과학회/대한산업공학회
- Citation
- 한국경영과학회/대한산업공학회 춘계공동학술대회
- Conference Name
- 한국경영과학회/대한산업공학회 춘계공동학술대회
- Place
- KO
부산대학교
- Conference Date
- 2009-05-22
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