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FEM(Finite Element Method)를 이용한 CMP(Chemical Mechanical Process) 공정 시뮬레이션과 Run-to-Run 제어 기법에 관한 연구
- Authors
- KIM SUNG SHICK
- Issue Date
- 22-May-2009
- Conference Name
- 한국경영과학회/대한산업공학회 춘계공동학술대회 논문집
- Place
- 대한민국
부산대학교
- Conference Date
- 2009-05-22 ~ 2009-05-23
- Conference Name
- 한국경영과학회/대한산업공학회 춘계공동학술대회
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Collections - College of Engineering > ETC > 2. Conference Papers
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