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High frequency and high power PECVD를 이용한 thin film solar cell용 microcrystalline Si 증착
- Authors
- BYUN, Dong Jin
- Issue Date
- 21-5월-2009
- Publisher
- 한국재료학회
- Citation
- 2009년도 한국재료학회
- Conference Name
- 2009년도 한국재료학회
- Place
- KO
- Conference Date
- 2009-05-21
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