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Quantitative Profiling of Temperature and Spreading Thermal Resistance around a 70 nm Wide Nano-Heater Patterned on SOI Wafer Using NP SThM
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | KWON, Oh Myoung | - |
| dc.date.accessioned | 2021-08-29T02:53:41Z | - |
| dc.date.available | 2021-08-29T02:53:41Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2015-04-10 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/35534 | - |
| dc.publisher | MATERIALS RESEARCH SOCIETY | - |
| dc.title | Quantitative Profiling of Temperature and Spreading Thermal Resistance around a 70 nm Wide Nano-Heater Patterned on SOI Wafer Using NP SThM | - |
| dc.title.alternative | Quantitative Profiling of Temperature and Spreading Thermal Resistance around a 70 nm Wide Nano-Heater Patterned on SOI Wafer Using NP SThM | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | KWON, Oh Myoung | - |
| dc.identifier.bibliographicCitation | 2015 MRS SPRING MEETING & EXHIBIT | - |
| dc.relation.isPartOf | 2015 MRS SPRING MEETING & EXHIBIT | - |
| dc.relation.isPartOf | 2015 MRS SPRING MEETING & EXHIBIT PROGRAM & EXHIBIT GUIDE | - |
| dc.citation.title | 2015 MRS SPRING MEETING & EXHIBIT | - |
| dc.citation.conferencePlace | US | - |
| dc.citation.conferenceDate | 2015-04-06 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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