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High density aluminium oxide gas barrier formed by neutral beam assisted sput-teringHigh density aluminium oxide gas barrier formed by neutral beam assisted sput-tering
- Alternative Title
- High density aluminium oxide gas barrier formed by neutral beam assisted sput-tering
- Authors
- Hong MunPyo
- Issue Date
- 11-2월-2015
- Publisher
- (사)한국진공학회(KVS)
- Citation
- 제48회 한국진공학회 동계정기학술대회
- Conference Name
- 제48회 한국진공학회 동계정기학술대회
- Place
- KO
- Conference Date
- 2015-02-09
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Collections - Graduate School > Department of Applied Physics > 2. Conference Papers
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