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Low Temperature Metal Induced Crystallized Polycrystalline Silicon by Au nano-dot patterns using Laser interference LithographyLow Temperature Metal Induced Crystallized Polycrystalline Silicon by Au nano-dot patterns using Laser interference Lithography

Alternative Title
Low Temperature Metal Induced Crystallized Polycrystalline Silicon by Au nano-dot patterns using Laser interference Lithography
Authors
Ju, Byeongkwon
Issue Date
26-8월-2014
Publisher
킨텍스
Citation
IMID 2014, pp.372
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/39028
Conference Name
IMID 2014
Place
KO
Conference Date
2014-08-26
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공과대학 (전기전자공학부)
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