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High Density Aluminum Oxide Gas Barrier by Neutral Beam Assisted Sputtering Process
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Hong MunPyo | - |
| dc.date.accessioned | 2021-08-29T09:34:07Z | - |
| dc.date.available | 2021-08-29T09:34:07Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2014-07-25 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/39331 | - |
| dc.publisher | KOEAUK | - |
| dc.title | High Density Aluminum Oxide Gas Barrier by Neutral Beam Assisted Sputtering Process | - |
| dc.title.alternative | High Density Aluminum Oxide Gas Barrier by Neutral Beam Assisted Sputtering Process | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Hong MunPyo | - |
| dc.identifier.bibliographicCitation | EKC2014(EU-Korea Conference on Science & Technology 2014) | - |
| dc.relation.isPartOf | EKC2014(EU-Korea Conference on Science & Technology 2014) | - |
| dc.relation.isPartOf | EKC2014(EU-Korea Conference on Science & Technology 2014) | - |
| dc.citation.title | EKC2014(EU-Korea Conference on Science & Technology 2014) | - |
| dc.citation.conferencePlace | AU | - |
| dc.citation.conferenceDate | 2014-07-22 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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