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Effect of neutral beam treatment on nanocrysallization of silicon thin film by neutral beam assisted CVD at near room temperatureEffect of neutral beam treatment on nanocrysallization of silicon thin film by neutral beam assisted CVD at near room temperature
- Alternative Title
- Effect of neutral beam treatment on nanocrysallization of silicon thin film by neutral beam assisted CVD at near room temperature
- Authors
- Hong MunPyo
- Issue Date
- 9-7월-2014
- Publisher
- KVS(The Korean Vaccuum Society)
- Citation
- ICMAP 2014 - International Confernce on Microelectronics and Plasma Technology 2014
- Conference Name
- ICMAP 2014 - International Confernce on Microelectronics and Plasma Technology 2014
- Place
- KO
- Conference Date
- 2014-07-08
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Collections - Graduate School > Department of Applied Physics > 2. Conference Papers
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