Ionic properties of yttria stabilized zirconia (YSZ) fabricated by atomic layer deposition (ALD) with water, oxygen, and ozone
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Shim, Joon Hyung | - |
dc.date.accessioned | 2021-08-29T10:36:33Z | - |
dc.date.available | 2021-08-29T10:36:33Z | - |
dc.date.created | 2021-04-22 | - |
dc.date.issued | 2014-06-16 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/39969 | - |
dc.publisher | American Vacuum Society | - |
dc.title | Ionic properties of yttria stabilized zirconia (YSZ) fabricated by atomic layer deposition (ALD) with water, oxygen, and ozone | - |
dc.title.alternative | Ionic properties of yttria stabilized zirconia (YSZ) fabricated by atomic layer deposition (ALD) with water, oxygen, and ozone | - |
dc.type | Conference | - |
dc.contributor.affiliatedAuthor | Shim, Joon Hyung | - |
dc.identifier.bibliographicCitation | The 14th Atomic Layer Deposition (ALD 2014) | - |
dc.relation.isPartOf | The 14th Atomic Layer Deposition (ALD 2014) | - |
dc.relation.isPartOf | N/A | - |
dc.citation.title | The 14th Atomic Layer Deposition (ALD 2014) | - |
dc.citation.conferencePlace | JA | - |
dc.citation.conferenceDate | 2014-06-15 | - |
dc.type.rims | CONF | - |
dc.description.journalClass | 1 | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
(02841) 서울특별시 성북구 안암로 14502-3290-1114
COPYRIGHT © 2021 Korea University. All Rights Reserved.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.