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Ionic properties of yttria stabilized zirconia (YSZ) fabricated by atomic layer deposition (ALD) with water, oxygen, and ozoneIonic properties of yttria stabilized zirconia (YSZ) fabricated by atomic layer deposition (ALD) with water, oxygen, and ozone
- Alternative Title
- Ionic properties of yttria stabilized zirconia (YSZ) fabricated by atomic layer deposition (ALD) with water, oxygen, and ozone
- Authors
- Shim, Joon Hyung
- Issue Date
- 16-6월-2014
- Publisher
- American Vacuum Society
- Citation
- The 14th Atomic Layer Deposition (ALD 2014)
- Conference Name
- The 14th Atomic Layer Deposition (ALD 2014)
- Place
- JA
- Conference Date
- 2014-06-15
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Collections - College of Engineering > Department of Mechanical Engineering > 2. Conference Papers
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