NP SThM을 이용한 SOI 기판위의 전기적으로 가열된 나노 히터 주변 온도분포 정량적 계측NP SThM을 이용한 SOI 기판위의 전기적으로 가열된 나노 히터 주변 온도분포 정량적 계측
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