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Variation of subthreshold swing of solution-processed Zr-Si-In-Zn-O thin film transistor at low annealing temperature
Choi, Jun Young;
Kim, SangSig
; Lee, Sang Yeol
Article
Issue Date
2013
Citation
ELECTRONIC MATERIALS LETTERS, v.9, no.4, pp.489 - 491
Publisher
KOREAN INST METALS MATERIALS
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Author
Choi, Jun Young
1
Subject
OXIDE
1
oxide thin film transistor
1
SiO
1
solution process
1
threshold voltage
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Date Issued
2013
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Article
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English
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Electronic Materials Letters
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