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Simulation Study: The Impact of Structural Variations on the Characteristics of a Buried-Channel-Array Transistor (BCAT) in DRAM
open access
Sun, Minjae; Baac, Hyoung Won;
Shin, Changhwan
Article
Issue Date
2022
Citation
MICROMACHINES, v.13, no.9
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MDPI
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Baac, Hyoung Won
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Sun, Minjae
1
Subject
buried channel array transistor
1
device characteristics
1
ELECTRIC-FIELD
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short channel effects
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structural variation
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2022
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Micromachines
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scie
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scopus
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