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Study of the N2O plasma treatment process optimization for protection layer materials
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Ju, Byeongkwon | - |
| dc.date.accessioned | 2021-08-29T14:50:21Z | - |
| dc.date.available | 2021-08-29T14:50:21Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2013-11-12 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/42621 | - |
| dc.publisher | The Korean Institute of Electrical and Electronic Material Engineers | - |
| dc.title | Study of the N2O plasma treatment process optimization for protection layer materials | - |
| dc.title.alternative | Study of the N2O plasma treatment process optimization for protection layer materials | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Ju, Byeongkwon | - |
| dc.identifier.bibliographicCitation | ICAE 2013 | - |
| dc.relation.isPartOf | ICAE 2013 | - |
| dc.relation.isPartOf | ICAE 2013 | - |
| dc.citation.title | ICAE 2013 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferenceDate | 2013-11-12 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 2 | - |
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