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Study of the N2O plasma treatment process optimization for protection layer materialsStudy of the N2O plasma treatment process optimization for protection layer materials
- Alternative Title
- Study of the N2O plasma treatment process optimization for protection layer materials
- Authors
- Ju, Byeongkwon
- Issue Date
- 12-11월-2013
- Publisher
- The Korean Institute of Electrical and Electronic Material Engineers
- Citation
- ICAE 2013
- Conference Name
- ICAE 2013
- Place
- KO
- Conference Date
- 2013-11-12
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Collections - College of Engineering > School of Electrical Engineering > 2. Conference Papers
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