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Effect of Neutral Beam Treatment On Nanocrystallization of Silicon Thin Film By Neutral Beam Assisted CVD At Near Room Temperature
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Hong MunPyo | - |
| dc.date.accessioned | 2021-08-29T15:29:52Z | - |
| dc.date.available | 2021-08-29T15:29:52Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2013-10-29 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/42912 | - |
| dc.publisher | the Eletrochemical Society | - |
| dc.title | Effect of Neutral Beam Treatment On Nanocrystallization of Silicon Thin Film By Neutral Beam Assisted CVD At Near Room Temperature | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Hong MunPyo | - |
| dc.identifier.bibliographicCitation | 224th ECS MEETING | - |
| dc.relation.isPartOf | 224th ECS MEETING | - |
| dc.relation.isPartOf | 224th ECS MEETING | - |
| dc.citation.title | 224th ECS MEETING | - |
| dc.citation.conferencePlace | US | - |
| dc.citation.conferenceDate | 2013-10-27 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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Collections - Graduate School > Department of Applied Physics > 2. Conference Papers
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