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Influence of Nano-Crystal Silicon Thin Film and Thin Film Transistor Under Neutral Beam Assisted Hydrogen Plasma Treatment
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Hong MunPyo | - |
| dc.date.accessioned | 2021-08-29T16:33:54Z | - |
| dc.date.available | 2021-08-29T16:33:54Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2013-08-28 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/43613 | - |
| dc.publisher | CeSTA (Center for Surface Technology and Applications) | - |
| dc.title | Influence of Nano-Crystal Silicon Thin Film and Thin Film Transistor Under Neutral Beam Assisted Hydrogen Plasma Treatment | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Hong MunPyo | - |
| dc.identifier.bibliographicCitation | AEPSE 2013 (9th Asian-European International Conference On Plasma Surface Engineering) | - |
| dc.relation.isPartOf | AEPSE 2013 (9th Asian-European International Conference On Plasma Surface Engineering) | - |
| dc.relation.isPartOf | AEPSE 2013 (9th Asian-European International Conference On Plasma Surface Engineering) | - |
| dc.citation.title | AEPSE 2013 (9th Asian-European International Conference On Plasma Surface Engineering) | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.conferenceDate | 2013-08-25 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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