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Effect of inductively coupled plasma on the electrical and optical properteis of induim tin oxide films deposited by ionized physical vapor depositionEffect of inductively coupled plasma on the electrical and optical properteis of induim tin oxide films deposited by ionized physical vapor deposition
- Alternative Title
- Effect of inductively coupled plasma on the electrical and optical properteis of induim tin oxide films deposited by ionized physical vapor deposition
- Authors
- Ju, Byeongkwon
- Issue Date
- 25-8월-2013
- Publisher
- AEPSE
- Citation
- AEPSE 2013
- Conference Name
- AEPSE 2013
- Place
- KO
- Conference Date
- 2013-08-25
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Collections - College of Engineering > School of Electrical Engineering > 2. Conference Papers
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