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New Approaches for Extremely High Doping and High Crystal Fraction in the Mixed Phase Nano-Crystal Silicon Thin Film by Near Room Temperature Deposition Process with Neutral Beam Assisted CVD
- Authors
- Hong MunPyo
- Issue Date
- 6-2월-2013
- Publisher
- 동부하이텍, 한국반도체산업협회, 한국반도체연구조합
- Citation
- 제20회 한국반도체학술대회
- Conference Name
- 제20회 한국반도체학술대회
- Place
- KO
웰리힐리파크
- Conference Date
- 2013-02-04
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Collections - Graduate School > Department of Applied Physics > 2. Conference Papers
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