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Fabrication of suspended bridge type resonator using laser interference lithography

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dc.contributor.authorRieh, Jae-Sung-
dc.date.accessioned2021-08-29T19:29:15Z-
dc.date.available2021-08-29T19:29:15Z-
dc.date.created2021-04-22-
dc.date.issued2012-10-29-
dc.identifier.urihttps://scholar.korea.ac.kr/handle/2021.sw.korea/45290-
dc.publisherIEEE-
dc.titleFabrication of suspended bridge type resonator using laser interference lithography-
dc.title.alternativeFabrication of suspended bridge type resonator using laser interference lithography-
dc.typeConference-
dc.contributor.affiliatedAuthorRieh, Jae-Sung-
dc.identifier.bibliographicCitationEuropean Microwoave Integrated Circutis Conference (EuMIC)-
dc.relation.isPartOfEuropean Microwoave Integrated Circutis Conference (EuMIC)-
dc.relation.isPartOfProceeding of European Microwoave Integrated Circutis Conference (EuMIC)-
dc.citation.titleEuropean Microwoave Integrated Circutis Conference (EuMIC)-
dc.citation.conferencePlaceNE-
dc.citation.conferenceDate2012-10-29-
dc.type.rimsCONF-
dc.description.journalClass1-
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